硅片涂胶及软烘自动设备的研制  

The Development of the Automatic Equipment for Gelatinizing & Soft Baking

作　　者：陈丁[1,2] 徐昌杰[1] 陈大川[1,3] 张海刚[4] 王慧[1] 

机构地区：[1]西安工业大学光电工程学院,西安710032 [2]中国兵器工业集团公司西安北方光电有限公司,西安710043 [3]长春理工大学光电信息学院,长春130012 [4]西安工业大学电子信息工程学院,西安710032

出　　处：《微计算机信息》2009年第25期77-79,共3页Control & Automation

摘　　要：为了提高硅片光刻工艺中—涂胶及软烘两操作的实验效率,减少手工操作可能带来对硅片表面的污染。系统采用机械手代替手工完成硅片在各工位之间自动化传输。硬件部分采用PLC作为控制核心部件,由步进电机、接近开关、光电开关、热电阻、电磁阀等组成。详细介绍了软件控制方法,实现硅片精确传输、光刻胶用量控制、软烘温度检测等功能。This paper systematically introduces how to increase efficiency of gelatinizing and soft baking in photolithographic experimental process, and to avoid touching the top of silicon water by hand directly. In this system, manipulator takes the place of hand to transmit silicon water from one to another. PLC is as the core of hardware system, and it comprises stepper motor, proximity switch, photoelectric switch, hot resistance, electromagnetic valve et al. Besides, it explains the algorithm of control programs. The system achieves several function such as pinpoint transmission, titer of photo resist control, temperature control.

关 键 词：PLC 精确传输 滴胶量控制 温度控制 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]