硅微陀螺仪驱动信号提取端口噪声分析  

The Noise Analysis of Drive Signal Sense Interface of Silicon Micromachined Gyroscope

作　　者：杨波[1] 王寿荣[1] 扶文树[2] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]南京北方信息产业集团有限公司,南京211153

出　　处：《传感技术学报》2009年第9期1293-1297,共5页Chinese Journal of Sensors and Actuators

基　　金：教育部博士点新教师基金资助(200802861063);船舶工业国防预研基金资助(6922001045);总装备部"十一五"预研项目资助(6922002055)

摘　　要：建立了硅微陀螺仪驱动模态的接口模型,设计了驱动速度信号敏感接口电路,分析表明合理的参数选择基本消除了接口模型中寄生电阻电容导致信号衰减。建立了接口电路的噪声模型,推导了各噪声源导致输出噪声电压公式。仿真和试验表明,由运算放大器的噪声电压和噪声电流,及上置直流偏置电阻R1所产生的噪声功率较大。因此,减小前置运算放大器的输入噪声电压、噪声电流以及寄生电容Cpp或者增大直流偏置电阻R1可以有效抑制上述噪声的影响。The interface model of drive-mode of Silicon Micromachined Gyroscope（SMG） was established and the interface circuitry for sensing the drive velocity signal was designed. The analytic results indicated that the reasonable parameter of the interface circuitry can remove most impacts of these parasitic capacitances and reduce attenuation of the signal. The noise model of the interface circuitry was established. The outputs of noise voltage which was caused by noise sources were deduced. The simulation and experiment results indicated that the output noise powers which came from thermal noise of bias resistance R1, input noise voltage and input noise current of the operational amplifier were bigger than the others. So the impacts of the output noise powers can be suppressed through reducing parasitic capacitance Cpp, the inputs of the noise voltage and the noise current of the operational amplifier,as well as increasing bias resistance R1.

关 键 词：硅微陀螺仪 接口模型 寄生电容 噪声分析 

分 类 号：U666.123[交通运输工程—船舶及航道工程]