微机电混合陀螺仪的系统设计与仿真  

System design and simulation of microelectromechanical hybrid gyroscope

作　　者：杨波[1,2] 王寿荣[1,2] 李坤宇[1,2] 张玉凤[1,2] 

机构地区：[1]东南大学仪器科学与工程学院,南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,南京210096

出　　处：《东南大学学报（自然科学版）》2009年第5期951-955,共5页Journal of Southeast University：Natural Science Edition

摘　　要：研究了一种新型的微机电混合陀螺仪,它既具有实现传统动力调谐陀螺仪较高精度的潜力,又具有硅微陀螺仪体积小、价格低等优点.研究了该陀螺接口电路,推导了该接口信号灵敏度公式,分析表明增加检测电容Ct和Cb或者减小寄生电容Cp都可以提高信号灵敏度.同时,还推导了力矩器的力矩传递系数和信号器的电容信号传递系数公式,分析表明减小电容间距d和内环半径R1或者增加外环半径R2都可以提高电容信号器灵敏度.提出一种利用力矩器负刚度效应对微机电混合陀螺进行调谐的方法,并研究了全解耦闭环反馈控制电路.开环仿真表明,残余刚度将导致转子自转轴进动,而调谐后转子自转轴能保持原方位稳定.闭环仿真表明,研究的全解耦闭环反馈控制电路是可行的.Described in this paper is a microelectromechanical hybrid gyroscope with advantages not only in the potentiality of achieving high precision like the traditional dynamically tuned gyroscope （DTG）, but also in small size and low cost like the Silicon Micromachined Gyroscope（SMG）. An interface circuit is researched, the sensitivity equation of the interface circuit is deduced. The analysis shows that the signal sensitivity can be improved by increasing the sense capacitances Ct and Cb or decreasing the parasitical capacitance Cp. The transfer coefficients of the moment and signaler are derived. The analysis shows that the sensitivity of capacitance signal transducer can be improved by decreasing the capacitance gap d and inner ring radius R1 or increasing the external ring radius R2. A new tuned method which tunes the microelectromechanical hybrid gyroscope by negative stiffness effectiveness of the moment is adopted and a decouple closed-loop feedback control circuit is researched. The open-loop simulation shows that the residual stiffness will lead to the precessional motion of the axis of rotation of microelectromechanical hybrid gyroscope. However, when the residual stiffness is revised, the axis of rotation of microelectromechanical hybrid gyroscope will maintain original orientation. The closed-loop simulation shows that the decouple closed-loop feedback control circuit is feasible.

关 键 词：微机电混合陀螺仪 接口线路 负刚度效应 闭环反馈控制 

分 类 号：U666.123[交通运输工程—船舶及航道工程]