基于高分辨力CCD的大口径光学元件疵病检测  

Defect testing of large aperture optics based on high resolution CCD camera

作　　者：程晓锋[1] 徐旭[1] 张林[1] 贺群[1] 袁晓东[1] 蒋晓东[1] 郑万国[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2009年第11期1677-1680,共4页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目

摘　　要：介绍了一种利用高分辨力CCD快速检测大口径光学元件表面和体内疵病的方法。利用侧照明方式对大口径光学元件进行均匀掠射照明,表面和体内疵病因为散射在暗室成像过程中影像被放大。对比研究了疵病示踪尺寸和真实尺寸,得出近似数学关系,利用高分辨力CCD,通过一次性成像获得光学元件疵病尺寸近似值、2维空间位置等定量描述表面特征的信息。A fast testing method on inspecting defects of large aperture optics was introduced. With uniform illumination by LED source at grazing incidence, the image of defects on the surface of and inside the large aperture optics could be enlarged due to scattering. The images of defects were got by high resolution CCD camera and microscope, and the approximate mathematical relation between viewing dimension and real dimension of defects was simulated. Thus the approximate real dimension and location of all defects could be calculated through the high resolution pictures.

关 键 词：ICF 大口径光学元件 疵病 快速检测 

分 类 号：TN244[电子电信—物理电子学]