静电力反馈微加速度计的模拟控制器优化  

Optimized controller for electrostatic force feedback micro accelerometers

作　　者：万蔡辛[1] 董景新[1] 刘云峰[1] 胡淏[1] 

机构地区：[1]清华大学精密测试技术及仪器国家重点实验室,北京100084

出　　处：《清华大学学报（自然科学版）》2009年第11期1779-1782,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家“十一五”科技预研项目(51309050208)

摘　　要：静电力反馈微加速度计在突然受较大加速度冲击后出现振荡失效,严重影响工作可靠性。为查明失效原因、优化设计以保证全工作范围内稳定性,研究了系统动特性随外界加速度的变化。将静电刚度引入以分析失效原因,并根据分析结果提出模拟控制器的改进方案。SIMULINK对比仿真的结果和电测法对比实验的结果确认了对失效原因的判断,验证了改进方案的可行性。工程实际中,该文提出的分析与优化方法可以指导此类加速度计的可靠性设计,通过选择合理的控制器网络形式和参数,避免加速度计受冲击后振荡失效。Oscillation failures of electrostatic force feedback micro accelerometers, which seriously limits their reliability, occur when the accelerometer suddenly suffers an external acceleration impact. The variation of the system dynamic characteristics with large external accelerations was studied to determine the cause of such failures. The electrostatic stiffness was included in during the analysis to optimize the analog controller design. SIMULINK simulations verify that the failures are due to the electrostatic stiffness that the solution is effective. The analysis and optimized solution give a reliable design that eliminates oscillation failures after impacts by properly choosing the controller structure and parameters.

关 键 词：微加速度计 非线性系统 静电力 控制器 

分 类 号：TH824.4[机械工程—仪器科学与技术]