激光微加工系统及其控制单元的研究  

Study of laser fabricated system and its control system

作　　者：邬泳[1] 傅星[1] 刘春阳[1] 孙凤鸣[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《电子技术应用》2009年第11期30-32,共3页Application of Electronic Technique

摘　　要：针对纳秒脉冲激光微加工系统的发展,提出了一种集成图形文件解析和高速运动控制的加工系统,包括控制单元、激光器、机械结构和光路系统。在介绍了各个部分的功能之后,重点分析了控制单元,包括上位机图形解析平台及以DSP和FPGA为核心的下位机控制硬件。通过实验分析和算法优化,解决了加工误差,在单晶硅表面得到了较好的微结构加工效果。To meet the requirement of laser fabricated system, a system with high-speed control and resolving graphics integrated, is designed. The system consists of control unit, laser, mechanical structure and optical system. After describing the function of four sections, control system is introduced completely, including software of computer and control hardware based on DSP ＆ FPGA. By analyzing experimental data and adding in error compensation, the structures with better quality are machined.

关 键 词：控制系统 DSP FPGA 图形解析 微加工系统 

分 类 号：TP205[自动化与计算机技术—检测技术与自动化装置]