工业纯铁等离子体氮化及Ti/TiN多层薄膜沉积复合处理研究  

Surface Modification of Pure Iron by Plasma Nitridation and Ti/TiN Coating

作　　者：陈畅子[1,2] 孙鸿[1] 吴艳苹[1,3] 白彬 张鹏程 冷永祥[1] 黄楠[1] 

机构地区：[1]西南交通大学材料先进技术教育部重点实验室,材料科学与工程学院,成都610031 [2]贵州航天精工制造有限公司,遵义563006 [3]表面物理与化学国家重点实验室,江油621700

出　　处：《真空科学与技术学报》2009年第6期581-585,共5页Chinese Journal of Vacuum Science and Technology

基　　金：表面物理与化学国家重点实验室基金(SPC200701);教育部新世纪人才计划(NCET-06-0800);四川省杰出青年学科带头人培养资助计划(06ZQ026-015)资助

摘　　要：为改善工业纯铁的耐磨抗腐蚀性能,本文采用低偏压高频等离子浸没离子注入及氮化技术(HLPⅢ)对工业纯铁进行表面改性,然后利用非平衡磁控溅射技术(UBMS)在低压高频等离子浸没离子注入及氮化处理样品表面制备Ti/TiN多层膜。研究发现,工业纯铁在3.5kV脉冲电压(频率15.15kHz,占空比25%)下等离子注入及氮化3h后,表面形成了深度达4μm的氮化层,其相结构以ε-Fe3N和γ-Fe4N结构为主。等离子氮化及Ti/TiN多层薄膜沉积复合处理后,工业纯铁的硬度、耐磨损性能以及抗腐蚀性能均得到大大提高,等离子注入及氮化形成的氮化层有利于提高Ti/TiN多层薄膜与工业纯铁基体之间的结合力和耐磨性。The surfaces of commercial available pure iron were modified by plasma nitridation and by Ti/TiN coating. First, the iron surfaces were nitridized by high pulse frequency, low voltage, plasma immersion plus ion implantation （HLPⅢ）. Then, the Ti/TiN multi-layers were grown by unbalanced magnetron sputtering on the nitridized iron surfaces. The micro-structures and mechanical properties of the modified surfaces were characterized with X-my diffraction （XRD）, energy dispersive spectroscopy （EDS）, X-my photoelectron spectroscopy （XPS）, potentiodynamic polarization and conventional mechanical probes. The impacts of plasma nitridation and the coating conditions on morphology and properties of the modified iron surfaces were studied. The results show that the combined surface modification significantly improves the mechanical properties of the iron surface. For example, the modification increases its surface hardness, its wear and corrosion resistances. In addition, the adhesion at the interface of the nitride and iron substrate was found to be fairly-strong.

关 键 词：低偏压高频等离子浸没离子注入 非平衡磁控溅射 耐腐蚀 氮化钛 结合力 

分 类 号：TG156.82[金属学及工艺—热处理] TG156.8[金属学及工艺—金属学]