高量程压阻加速度传感器横向响应的测试及分析  

Measurement and Analysis of Transverse Response of High-g Piezoresistive Accelerometer

作　　者：鲍海飞[1] 李昕欣[1] 宋朝辉[1] 张鲲[1] 刘民[1] 陆德仁[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《仪表技术与传感器》2009年第B11期228-231,共4页Instrument Technique and Sensor

基　　金：国家973微纳机电敏感结构与传感器(2006CB300405)

摘　　要：文中提出了一种高量程压阻加速度传感器的灵敏度和横向灵敏度参数在动态冲击环境下的简易测试方法。采用金属杆自由落体的比较法,即将待测试的加速度传感器和已标定过的加速度传感器以背靠背的形式固定在金属杆的尾端,金属杆从一定高度自由落下与放置在地面上的金属砧发生相互碰撞,利用双通道放大器和计算机数据采集系统同时记录两路信号。实验中分别对6 000 g和60 000 g的压阻加速度传感器进行了研究,该方法具有较好的重复性和可靠性,并分析了测试偏差来源对横向响应的影响。A method was proposed for measuring the sensitivity and transeverse repsonse of high-g accelerometer, in which, a comparison method was used to investigate the output properties of accelerometer. The standard aceelerometer and the accelerometer to be measured were mounted in a back-to-back style onto the end of metal bar and dropped freely on the anvil placed on the ground. By simultaneously monitoring the outputs of the dual-channels, the typical parameters can be determined. Accelerometers with full ranges of 6 000 g and 60 000 g were measured, which shows this method is reliable and easily to be implemented. The influence of the error sources in the measurement on the transverse response was also analyzed.

关 键 词：高量程微加速度传感器 横向响应 波形比较法 自由落杆 微机电系统 

分 类 号：TP21[自动化与计算机技术—检测技术与自动化装置]