OEM压阻芯片性能测试及装置  

Performance Testing Device for OEM Piezoresistive Chip

作　　者：匡石[1] 冯艳敏[1] 郑东明[1] 徐长伍[1] 张玉喆[2] 

机构地区：[1]沈阳仪表科学研究院,辽宁沈阳110043 [2]辽宁大学计算机信息学院,辽宁沈阳110036

出　　处：《仪表技术与传感器》2009年第B11期246-248,258,共4页Instrument Technique and Sensor

摘　　要：OEM压阻芯片性能测试装置由2个平台构成,即硬件平台和软件平台,具有自动测试芯片性能和控制探针台功能。OEM压阻芯片性能测试可实现4寸(1寸=2.54 cm)芯片上近千个传感器图形的性能测试。每个图形测试项目包括桥路电阻、失调电压、漏流、击穿。对测试项目的合格判定标准实现了开放式管理,可根据不同类别的传感器芯片,设置不同的合格判定标准;在击穿电压测试项目中,对反向偏置电压设置实现了开放式管理,可根据不同的要求,设置不同的反向偏置电压,方便了应用。The performance testing device for OEM piezoresistive chip consists of two platforms, which are hardware and software platforms, with the function of automatically testing the performance of the chip and controlling the probe. By testing of the performance of the OEM piezoresistive chip, it can implement the performance testing of nearly 1 000 sensor graphics on the 4-inch chip. The testing project of every sensor graphic includes bridge resistance, offset voltage, leakage and breakdown voltage. The test criteria for the project was opened up to the management, it can be set up different criteria according to different types of sensor chips ; in the project of testing breakdown voltage, to facilitate the application, the open management was complied in the reverse bias voltage setting, in this condition different reverse bias voltages can be set on the basis of different requirements.

关 键 词：OEM压阻芯片 桥路电阻 失调电压 漏流 击穿电压 芯片性能测试原理 芯片性能自动测试程序设计 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]