微型电场传感器的结构释放过程中粘连现象的控制方法  

Some Methods for Preventing Release Stiction of MEFS

作　　者：郭鑫[1,2] 张海岩[1,2] 彭春荣[1] 夏善红[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190 [2]中国科学院研究生院,北京100190

出　　处：《仪表技术与传感器》2009年第B11期328-329,352,共3页Instrument Technique and Sensor

基　　金：863项目(2006AA04Z347)

摘　　要：研究了微型电场传感器结构释放过程的粘连现象,通过实验采用不同的方法来避免粘连现象的产生,如蒸发干燥法,CO_2临界点干燥法,自组装膜方法,并对这些方法的优缺点进行了比较。结果表明CO_2临界点干燥法和自组装膜方法能够较好的避免粘连现象的产生,提高微型电场传感器的成品率。The release stiction of miniature electric field sensor （MEFS） was studied in this paper. Some methods such as evaporation drying, C02 critical point drying and the method of self-assembled monolayer were used in the experiment. Advantages and disadvantages of these methods were compared. From the result, CO2 critical point drying and the method of self-assembled monolayer can prevent release stiction effectively and improve the yield of MEFSs.

关 键 词：微型电场传感器 粘连现象 临界点干燥 自组装膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]