微机械气流式全方位姿态传感器的敏感机理  

Sensitive Mechanism of Micromachined Airflow Omnibearing Posture Sensor

作　　者：宋佳[1] 朴林华[1] 刘玉洁[1] 李言杰[1] 张福学[1] 

机构地区：[1]北京信息科技大学现代测控技术教育部重点实验室,北京100101

出　　处：《压电与声光》2009年第6期797-799,810,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划基金资助项目(NCET);北京市优秀人才培养基金资助项目;北京市重点实验室开放课题基金资助项目;北京市属高校人才强教计划基金资助项目(PHR);北京市新世纪百千万人才工程培养基金资助项目;北京市教委科技创新平台基金资助项目(PXM2008_014224_067420)

摘　　要：采用有限元法,解释了微机械气流式全方位水平姿态传感器的敏感机理。通过建立敏感元件的三维模型,计算了敏感元件内气流速度在不同倾斜状态下的分布。结果表明,热源周围两两相对的热敏电阻处的气流速度之差随着倾斜角度的变化而改变;随着倾斜角度的增加,两热敏电阻处的气流速度之差加大,流过两热敏电阻的电流之差加大,电桥失去平衡,输出一个与倾斜角度相对应的电压。有限元计算方法为该传感器的优化设计开辟了有效的研究途径。The sensitive mechanism of micromachined airflow omnibearing level posture sensor is explained with the method of FEA （finite element analysis）.The distributions of airflow velocity in different tilting states are calculated by building the three-dimensional model of this sensor＇s sense organ.The results show that the airflow velocity difference of two detection hot resistances,which are parallel face to face,changes with the tilt angle;the airflow velocity difference becomes larger with a larger tilt angle,which leads to a larger change of the current difference of both hot resistances,so the electric-bridge loses its balance and outputs a voltage signal of corresponding to the tilt angle.The finite element method provides an effective way for optimization of the sensor.

关 键 词：微机械 气流 全方位 敏感机理 

分 类 号：TN379[电子电信—物理电子学] TN37