利用波形比较法进行高量程加速度传感器横向响应的测试研究  

STUDY ON THE TRANSVERSE RESPONSE OF HIGH-g ACCELEROMETER BY A COMPARISON METHOD OF WAVEFORM

作　　者：鲍海飞[1] 宋朝辉[1] 李昕欣[1] 刘民[1] 张鲲[1] 陆德仁[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术国家重点实验室,上海200050

出　　处：《机械强度》2009年第6期1019-1023,共5页Journal of Mechanical Strength

基　　金：国家973计划(2006CB300405);国家863计划(2007AA048315-1)资助~~

摘　　要：提出一种高量程加速度传感器横向响应的测试方法——波形可识别的比较法,对高量程加速度传感器非敏感方向(横向)的输出特性进行测试研究。实验中采用自由落杆的方法,将已经标定过的传感器和带测试的传感器以背对背的方式进行安装,通过同时比较监控两通道的输出波形,可以确定器件的横向灵敏度。此方法简单可靠,并容易实施,对测试中产生的误差进行分析。A method was proposed for measuring the transverse response of high-g aecelerometer, in which, a comparison method of waveform with recognizable features was used to investigate the output properties in its non-sensitive direction. The standard accelerometer and the accelerometer to be measured were mounted in a back-to-back style onto the end of free-drop metal bar in the experiment. By simultaneously monitoring the outputs of the dual-channels, the transverse sensitivity of the device can be determined. The measurement result was verified and its error was analyzed, it shows this method is reliable and easily to be implemented.

关 键 词：高量程微加速度传感器 横向响应 波形比较法 自由落杆 微机电系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]