超精表面三维形貌相移干涉检测实验研究  

Research on phase-shifting interferometry contrast three-dimensional topography of ultra precision surface

作　　者：童晓蕾[1] 李玉和[1] 林浩山[1] 祁鑫[1] 

机构地区：[1]清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室,北京100084

出　　处：《电子测量与仪器学报》2009年第12期65-69,共5页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金(编号:50705051)资助项目

摘　　要：超精表面检测技术已成为超精密测量技术重要组成部分。本文提出了一种超精表面三维形貌的相移干涉显微检测方法。检测系统引入偏振分光棱镜,建立相移检偏干涉与三维形貌重构模型,采用四帧相移与轮廓中线法进行相位与粗糙度参数计算。编制图像处理与系统测试软件,并对标准样品进行实验,结果表明:样品粗糙度重复测量精度达2.8nm,测试系统具有抗干扰能力强、稳定性好等特点。The detection of ultra-precision surface has already been an important component of the ultra-precision measurement technique. In this paper, a phase-shifting interferometry method for three-dimensional （3D） topography of ultra-precision surface was proposed. The detection system in which polarization prism is introduced, builds a phase-shifting interference analyzer reconstruction and 3D morphology model, and uses the four phase-shift method and center line to calculate phase profile and roughness parameters. A image processing and system testing software was programmed. The experimental results of standard samples show that the repeatability of roughness is 2.8nm, the test system has a strong anti-interference ability, good stability, etc.

关 键 词：相移干涉 粗糙度 三维形貌 超精表面 

分 类 号：TH742.9[机械工程—光学工程]