氮原子在 CVD 低压金刚石制备过程中的作用  

The Functions of Nitrogen Atoms in the Process of CVD Diamond Synthesis under Low Pressure

作　　者：刘志杰[1,2] 张卫[1,2] 万永中[1,2] 张剑云[1,2] 王季陶[1,2] 曹传宝[1,2] 朱鹤孙[1,2] 

机构地区：[1]复旦大学电子工程系CVD研究室 [2]北京理工大学材料科学研究室

出　　处：《高技术通讯》1998年第9期36-39,共4页Chinese High Technology Letters

基　　金：863计划;国家自然科学基金

摘　　要：根据理论计算得到了碳氢氮体系低压金刚石生长非平衡定态相图，结果与实验数据相当符合，并通过相图和热力学计算讨论了氮原子含量对金刚石生长条件的影响以及在ＣＶＤ金刚石制备过程中提高金刚石薄膜生长速率的原因。Non equilibrium diamond growth phase diagram for C H N system under low pressure was calculated based on non equilibrium thermodynamics, which coordinates well with published experimental results. The reasons for the fact that the addition of nitrogen atoms can speed up the diamond deposition rate were discussed by using the phase diagrams.

关 键 词：氮 化学气相淀积 金刚石 薄膜生长 

分 类 号：TN304.18[电子电信—物理电子学] TN304.055