基于协调同步控制的MEMS微运动测量  

Micro-Motion Measurment of MEMS Based on Harmonious-Synchronous-Control Method

作　　者：谢勇君[1,2,3] 史铁林[2,3] 刘世元[2,3] 

机构地区：[1]暨南大学电气自动化研究所,广东珠海519070 [2]华中科技大学数字制造装备与技术国家重点实验室,湖北武汉430074 [3]武汉光电国家实验室(筹)光电材料与微纳制造研究部,湖北武汉430074

出　　处：《测控技术》2010年第1期35-38,共4页Measurement & Control Technology

基　　金：国家自然科学基金(50775090);新世纪优秀人才支持计划(NCET-06-0639);广东省自然科学基金博士研究启动项目(9451063201002281);广东高校优秀青年创新人才培育项目(LYM08019);暨南大学青年基金项目(51208027)

摘　　要：为协调有效地利用频闪成像、显微视觉和相移干涉技术实现微机电系统(MEMS,micro-electro-me-chanical systems)微运动的可靠测量,提出了一种改进的协调同步控制方法,该方法通过2块5 MHz频率的任意波形发生卡实现激光二极管(LD,laser diode)脉冲信号和MEMS激励信号的同频率相对延时,最小延时增量可达0.3 ns,最小脉冲宽度可达10 ns。基于该方法构建的测试系统可实现MEMS的离面(out-of-plane)和面内(in-plane)微运动的自动测量。通过对硅微悬臂梁离面振动以及硅微谐振器阵列面内振动的实验测量验证了新协调同步控制方法的有效性和实用性,其中离面微运动测量重复性误差小于10 nm,面内微运动测量重复性误差小于25 nm。An improved harmonious-synchronous-control method is proposed to reliably measure micro-motions of MEMS with stroboscopic imaging, microvision and phase-shift interferometry technologies. This method can realize the relative timing of the LD pulse train and the MEMS-drive waveform at a same frequency by two 5 MHz function generators, and the time-lapse increase is less than 0.3 ns, and the least pulse width is 10 ns. The measurement system based on this method can automatically test out-of-plane and in-plane micro-motions of MEMS. The experimental work conducted on Si micro-cantilevers and Si micro-resonator-arrays confirms that such a measurement system based on the new harmonious-synchronous-control method is effective and efficient to characterize micro-motions of MEMS. The error of measurement repeatability for out-of-plane micro-motions is less thanl0 nm, and the error of measurement repeatability for in-plane micro-motions is less than 25 nm.

关 键 词：MEMS 协调同步控制 离面微运动 面内微运动 

分 类 号：TH741.8[机械工程—光学工程]