基于SRAM光栅光调制器阵列控制系统电路的研究  

Study of a Control System Circuits Based on SRAM for Grating Light Modulator Array

作　　者：金珠[1] 温志渝[2] 张智海[1] 黄尚廉[1] 

机构地区：[1]重庆大学新型纳米器件与系统技术国家重点学科实验室,重庆400044 [2]重庆大学光电技术及系统教育部重点实验室,重庆400044

出　　处：《电子学报》2010年第2期393-398,共6页Acta Electronica Sinica

基　　金：国家自然科学基金(No.60708017);重庆市院士基金(No.CSTC;2008BC3002)

摘　　要：提出一种基于静态随机存储器(SRAM)的光栅光调制器阵列控制系统电路.介绍了光栅光调制器的加工工艺和工作原理,分析了该控制系统电路的原理和技术指标.利用Cadence软件和无锡华润上华0.5μm工艺,设计和加工了大小为8×8的控制系统电路.通过实验表明:加工的SRAM有源矩阵单元能够实现对输出电压的更新或保持;且加工的控制系统电路能够实现对光栅光调制器阵列的有源控制,从逻辑功能上验证了该控制系统电路设计的正确性.结果表明:只要该控制系统电路的行、列驱动电路能够在248MHz的时钟频率下工作,且有源矩阵单元的开关时间小于121ns,则该控制系统电路可以满足分辨率为1920×1080,帧频为30Hz,灰度级为256的投影显示.A control system circuits based on static random access memory（SRAM） for grating fight modulator （GLM） army is proposed in this paper. The process and operating principle of the GLM are introduced. The operating principle and technique parameters of the control system circuits are analyzed. With Cadence software and CSMC＇s 0.5μm process,a 8 × 8 control system circuits is designed and fabricated. The experimental results indicate that the output voltage can be refreshed or hold by the active matrix addressing based on SRAM; and the GLM can be controlled well by the fabricated control system circuits, which confirms the functional correctness of the designed control system circuits. The result indicates that if both the row and column driving circuits can work well in 248MHz clock frequency and the switch time of the active matrix unite is less than 12Ins,this designed control system circuits can be applied in projection display which has 1920×1080 resolution,30Hz frame frequency and 256 grayscale.

关 键 词：微机电系统 光栅光调制器 控制系统电路 静态随机存储器 

分 类 号：TN29[电子电信—物理电子学] TN402