微机械气流式姿态传感器敏感机理有限元分析  

The Three-dimensional FEM Analysis of Micro-mechanical Airflow Level Posture Sensor's Sensitive Mechanism

作　　者：刘玉洁[1] 朴林华[1] 翟新涛[2] 张福学[1] 

机构地区：[1]北京信息科技大学现代测控技术教育部重点实验室,北京100101 [2]海洋石油工程(青岛)有限公司设计部,山东青岛266520

出　　处：《压电与声光》2010年第1期42-44,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划(NCET)资助项目;北京市优秀人才培养资助项目;北京市重点实验室开放课题资助项目;北京市属高校人才强教计划资助项目(PHR);北京市新世纪百千万人才工程培养资助项目;北京市教委科技创新平台基金资助项目(PXM2008_014224_067420);现代测控技术教育部重点实验室资助

摘　　要：该文对微机械气流式水平姿态传感器敏感机理进行了三维的有限元分析。利用ANSYS-FLOTRANCFD软件,通过建模、划分网格、加载和求解等途径,计算了微机械气流式水平姿态传感器敏感元件密闭腔体中气流速度在不同倾斜状态下的分布。阐明微机械气流式水平姿态传感器的敏感机理,为气流式水平姿态传感器的优化设计开辟了更精确的研究途径。In the paper, the three-dimensional FEM analysis is used to analyze the sensitive mechanism of micro mechanical airflow level posture sensor. Using ANSYS-FLOTRAN CFD program and by means of a series of proce dure,such as model building, network modifying, loads applying and equation solving , the distribution of the gas flow velocity within airtight space of micro-mechanical airflow level posture s sensor＇s sensing element has been ob tained in many different incline states. The sensitive mechanism of micro-mechanical airflow level posture sensor has been explained. An even more accurate method for optimization of airflow level posture sensor was given.

关 键 词：微机械 气流 水平姿态 敏感机理 三维 

分 类 号：TN379[电子电信—物理电子学] TN37