聚焦离子束在光纤探针制备技术中的应用  

Applications of focused ion beam in optical fiber probe fabrication

作　　者：魏恩浩[1] 徐平[1] 王荣明[1] 商广义[1] 姚骏恩[1] 

机构地区：[1]北京航空天大学应用物理系,北京100191

出　　处：《电子显微学报》2009年第6期595-599,共5页Journal of Chinese Electron Microscopy Society

基　　金：科技部973项目(2007CB936503);基金委科学仪器基础研究专项(10827403)资助

摘　　要：本文概述了利用聚焦离子束制备用于近场光学显微镜光纤探针的方法,讨论了探针的锥型刻蚀、孔径控制和特殊结构加工等;论述了聚焦离子束的工作原理和在光纤探针高精度加工方面的优势。利用此技术制备的光纤探针的锥型和针尖孔径精确可控,并具有高光洁度,高通光效率等特点。The fabrication of optical fiber probe used in scanning near-field optical microscopy by focused ion beam（FIB）method has been reviewed.The probe shape milling,aperture size control and special structure fabrication is discussed respectively.The working principle and advantage in precise fabrication of FIB are also involved.The probes fabricated by FIB show advantages such as controllable taper shape and aperture size,smooth tip surface and high throughput.

关 键 词：聚焦离子束 刻蚀 光纤探针 针尖孔径 通光效率 

分 类 号：TH742[机械工程—光学工程]