混合集成电路PIND试验特征波形研究及控制方法  

Study on PIND Characteristic Pulse of Hybrid IC's and Its Control Methods

作　　者：陈亚兰[1] 肖玲[1,2] 

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060 [2]模拟集成电路国家级重点实验室,重庆400060

出　　处：《微电子学》2010年第1期153-156,共4页Microelectronics

摘　　要：介绍了混合集成电路PIND检测原理和试验不合格的原因及其控制办法;重点分析了具有固定波及满屏波特征的PIND失效来源;从试验方法、器件结构、工艺控制等三方面进行改进,取得了明显效果。Principle of PIND hybrid IC＇s was described. Reasons for PIND failure and its control methods were analyzed. The root cause for PIND failure with characteristics of fixed-pulse and full-screen pulse was analyzed in particular. Modifications were made on test method, device structure and process control, and satisfactory results were achieved.

关 键 词：混合集成电路 颗粒碰撞噪声检测 可靠性试验 

分 类 号：TN45[电子电信—微电子学与固体电子学]