变频式超声波发生器的高速锁相研究  

Research about High-speed Phase Locking in Frequency-modulated Ultrasonic Generator

作　　者：严勇文[1] 隆志力[1] 何将三[1] 杨岳峰[1] 

机构地区：[1]中南大学机电工程学院,长沙410083

出　　处：《电子与封装》2010年第2期35-37,47,共4页Electronics & Packaging

基　　金：国家重点基础研究发展计划资助项目(2003CB716202);国家自然科学基金青年科学基金项目(50605064);国家自然科学基金资助项目(50390064)

摘　　要：用于超声键合工艺的超声波发生器是引线键合封装设备的主要装置,其核心与关键是频率自动跟踪与锁相速度。文中构建了一种变频式超声波发生器,并对其中的高速锁相进行分析。通过换能器的电流反馈,采用基于嵌入式的数字式真有效值试探算法,超声波发生器锁相速度比传统速度提高数十倍,达到高速锁相的要求,满足了换能系统工作时的高速谐振需求。Ultrasonic generator for the ultrasonic bond process is the key system in lead bonding encapsulation equipment, its core and key is automatic frequency tracking and the speed of phase locking. This article con- structs a type of frequency-modulated ultrasonic generator and analyses its high-speed phase locking mechanism. Though the feedback of transducer＇s electricity, the phase locking speed of ultrasonic generator using digital true RMS heuristic approach algorithm base on embedded system is able to increase dozens of times compared with the traditional ones which reaches the high-speed phase locking demand and meets the challenge of high- speed resonance requirement when transducer system is working.

关 键 词：高速锁相 真有效值 平方根 超声键合 

分 类 号：TN911.8[电子电信—通信与信息系统]