三自由度压电叠堆微位移放大机构的研究  

Study on 3-DOF micro-positioning magnifying mechanism

作　　者：王宏峰[1] 陈道炯[1] 刘巍[1] 

机构地区：[1]上海理工大学机械工程学院,上海200093

出　　处：《现代制造工程》2010年第2期108-110,共3页Modern Manufacturing Engineering

基　　金：上海市教委重点学科建设资助项目(J50503)

摘　　要：提出一种应用于压电叠堆的微位移放大机构,该机构以压电叠堆为驱动元件,通过基于杠杆原理的柔性铰链二级放大机构,放大压电叠堆的输出位移,在互相垂直的三个自由度方向上通过磁性部件连接,实现三自由度方向上独立的位移输出。同时,通过仿真和试验,对其静态特性和动态特性进行研究。试验测试结果表明:该机构对压电叠堆输出位移的放大倍数达到5倍,三个自由度方向上的位移互相没有影响,并且该机构具有线性良好、高分辨率和高频响应等特点。A micro-displacement magnifying mechanism used in piezo-stack is presented. Taking the piezoelectric multilayer actu- ators as drivers of amplifier, the displacement of piezoelectric multilayer actuator is amplified with the flexure hinge amplifier based on the principles of lever-type amplification. By the magnetic assembly in 3- DOF connecting 3- DOF independent displacements were output. The static and dynamic characteristics are emulated and tested on the prototype; the characteristics of good linearity,high resolution and high frequency are approved. Experimental results conclude that the mechanism can amplify the displacement to 5 times. 3-DOF displacements have no influence on others.

关 键 词：压电叠堆 放大机构 三自由度 磁性连接 

分 类 号：TH38[机械工程—机械制造及自动化] TN384[电子电信—物理电子学]