光刻机光头调焦音圈电机的结构设计  

VCM STRUCTURE DESIGN FOR OPTICAL HEAD FOCUSING IN OPTICAL PRE ETCHING MACHINE

作　　者：罗敢[1] 王岳环[1] 张彪[1] 

机构地区：[1]华中理工大学

出　　处：《微电机》1998年第6期7-11,共5页Micromotors

摘　　要：以对光刻机刻蚀光头调焦音圈电机的设计的实际经验为例，阐述了音圈电机结构的设计原则，设计了两种结构的音圈电机，一种是采用氟塑料套筒，另一种采用滚珠导套。文中对这两种音圈电机的性能进行了分析。实验结果证明。In this paper,the authors explained the designing principles on VCM(voice coil motor) structure on the basis of the design of focusing VCM for the optical pre etching machine.Two kinds of VCM are provided,structure with fluorine plastic sleeve and rolling ball sleeve.At the end,the performances of these two kinds of VCM are analyzed,and the results proved the structure selected by the authors can provide good and stable performance.

关 键 词：音圈电机 结构设计 光头调焦 光刻机 磁盘 

分 类 号：TP333.03[自动化与计算机技术—计算机系统结构] TQ587.2[自动化与计算机技术—计算机科学与技术]