一种新型玻璃基底可用于微陀螺的反磁悬浮结构的设计与制造  

The Design and Manufacture of a New Type Glass-Substrated Device with Diamagnetic Levitation Rotor for Inertial Sensor

作　　者：戴福彦[1] 刘武[1] 张卫平[1] 陈文元[1] 刘凯[1] 张忠榕[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院,微米/纳米加工技术国家重点实验室,上海200030

出　　处：《传感技术学报》2010年第1期68-73,共6页Chinese Journal of Sensors and Actuators

基　　金：武器设备预研基金资助(9140A09020706JW0314);国家自然科学基金资助(60402003)

摘　　要：主要介绍了反磁悬浮系统的悬浮和稳定的原理以及用作惯性传感器的原理。研究了对反磁悬浮微器件理论。使用ANSOFT的MAXWELL3D有限元软件包分析了反磁转子悬浮微器件的悬浮问题,对于转子的悬浮、稳定和旋转进行了系统的仿真分析,包括受力分析与位移分析。对反磁悬浮微器件的制作工艺进行了研究。对反磁悬浮器件进行了相关实验。The principle of the stable levitation of rotor in the diamagnetic levitation micro device and it＇s using as inertial sensor,dynamic analysis are described in this paper.Contents include：（1）The principle of the stable levitation of rotor in the diamagnetic levitation micro device is presented.Analyses of the diamagnetic levitation system for the permanent magnet rotor tooth profile of tatic mechanics study show the stability under the structural parameters of the suspension permanent.（2）Using the MAXWELL 3D finite element analysis software in ANSOFT the problem of diamagnetic rotor suspension of suspended micro-device and rotor suspension are simulated,the rotation of the whole system,its stability,its stress and displacement are analyzed.（3）Diamagnetic micro-device manufacturing process was studied.（4）The related experiment of diamagnetic device is done.

关 键 词：反磁悬浮 微陀螺 微机电系统 玻璃基底 

分 类 号：V241.553[航空宇航科学与技术—飞行器设计]