冲击下悬臂梁断裂可靠性的节点分析法  

Node Analysis Method of Reliability for Cantilevers under Shock Load

作　　者：陈凌威[1] 宋竞[1] 唐洁影[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《传感技术学报》2010年第3期367-372,共6页Chinese Journal of Sensors and Actuators

基　　金：国家高技术研究发展计划(863)资助(2007AA04Z320)

摘　　要：随着微系统高密度和高集成度化趋势的发展,人们开始关注解决系统全局可靠性问题的设计和模拟方案。本文将传统电路领域的节点分析法移植到微系统的可靠性分析领域。通过对冲击下悬臂梁断裂可靠性问题的分析,演示了节点法分析系统全局可靠性问题的流程和可行性。利用冲击实验测量了不同方向和大小加速度冲击下的悬臂梁的断裂可靠度,基于节点模型结果和Weibull理论分析,指出工艺缺陷引起的早期失效是导致实验中较细悬臂梁约10%断裂失效几率的主要成因。With the development of the high-density and high integration trends of the micro-system, the design and simulation project of solving the overall reliability problem of the system have started to be paid attention to. In this paper, the nodal analysis method is transplanted from the field of traditional circuit to the reliability analysis of micro-system field. Through the analysis into the problem of cantilever beam fracturing reliability under attack, the process and feasibility of overall reliability problem will be demonstrated. The cantilever beam fracturing reliability under attack of different direction and acceleration is measured by attack experiment. Based on the results of the nodal model and Weibull theoretical analysis, it is pointed out that the early failure caused by the technical defects is the main reason for the fracturing and non-effectiveness probability of 10% of the thinner cantilever beam.

关 键 词：微电子机械系统 可靠性 系统级 节点分析法 悬臂梁 WEIBULL分布 

分 类 号：TN406[电子电信—微电子学与固体电子学]