投影栅相位法轮廓测量的非线性误差分析  

The non-inear error analysis on profile measurement by projecting grating phase method

作　　者：苏兰海[1] 余乐文[1] 马祥华[1] 夏君生[2] 

机构地区：[1]北京科技大学机械工程学院,北京100083 [2]北京教育考试院,北京100083

出　　处：《光学技术》2010年第1期102-105,共4页Optical Technique

摘　　要：分析了投影栅相位法三维轮廓测量系统的非线性误差。建立了几何光学模型,从理论上推导出被测点的相对高度与像点坐标的关系,研究了系统结构参数改变引起的高度误差的变化。详细阐述了像点坐标误差和系统非线性误差对系统精度的影响,并给出了高度误差补偿方法。据此提出修正的非线性高度拟合公式,实验结果证明新拟合公式的优越性。The non-linear error of three-dimensional profile measurement system is analyzed by projecting grating phase method.The geometric optics model is set up.The relation of measured points between relative height and image coordinate in theory are presumed.That a high degree of error change is caused by system structure parameters are studied.And the influence on system accuracy of image point coordinate error and system＇s non-linear error are analyzed in detail and some compensation approaches are provided in height.Then based on this,a modified height nonlinear fitting formula is provided.The superiority of the new fitting formula is proved by experiments.

关 键 词：几何光学 轮廓测量 非线性 误差补偿 

分 类 号：O435[机械工程—光学工程]