精密定位光栅尺的研究进展  

Review on the precision positioning grating scale

作　　者：朱沛[1] 张大伟[1] 黄元申[1] 倪争技[1] 庄松林[1] 

机构地区：[1]上海理工大学,上海200093

出　　处：《激光杂志》2010年第1期1-3,共3页Laser Journal

基　　金：国家科技部支撑计划（2006BAK03A03）资助; 上海市科委课题（07DZ22026 08DZ2272800 08ZR1415400）资助

摘　　要：本文主要简述光栅尺的最新发展历程。介绍了光栅尺的结构和测量原理以及光栅尺的分类和应用,讨论了光栅尺发展所面临的测量精度、信号处理及栅距细分、光栅的参考标记和绝对坐标以及光栅的载体和热性能等关键问题,并指出了光栅尺未来良好的发展趋势。The latest development of grating scale is reviewed.First,the structure and measuring principle of grating scale are introduced.Then the classification and application of grating scale are illustrated.Furthermore,several key factors of measurement accuracy,signal processing,the subdivision of grating pitch,the reference markup and absolute coordinates of grating and grating carrier and thermal properties which presented in the development of grating are described in detail.The paper also describes the trend of future development of grating scale.

关 键 词：精密定位 莫尔光栅 光栅尺 位移检测 

分 类 号：TN248.1[电子电信—物理电子学]