气体传感器阵列中微加热器的发展现状  

development of the microheater in gas sensor arrays

作　　者：何秀丽[1] 南金[1] 戴国瑞[1] 

机构地区：[1]吉林大学电子工程系

出　　处：《半导体杂志》1998年第4期34-39,共6页

基　　金：国家自然科学基金

摘　　要：本文总结了气体传感器中微加热器的材料、结构及热特性，列举了常见的几种微加热器，对Ｐｔ加热器和多晶Ｓｉ加热器进行比较，并在此基础上简要介绍了传感器阵列中微加热器的制作及气体传感器阵列的气敏特性。The materials、structures and thermal characteristics of microheater in gas-sensors were discussed in this paper. Some common microheaters were summarized. The comparisons between Pt heater and poly-Si heater were provided. Finally, the microheater in gas sensor arrays and the gas sensitivity of sensor array were briefly introduced.

关 键 词：微加热器 传感器阵列 神经网络 气体传感器 

分 类 号：TP212.03[自动化与计算机技术—检测技术与自动化装置] TP18[自动化与计算机技术—控制科学与工程]