微光机电系统光栅平动式光调制器的激光投影研究  

Study of Laser Projection Display Based on Micro-Opto-Electro-Mechanical System Grating Moving Light Modulator

作　　者：张智海[1,2] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044 [2]重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《中国激光》2010年第3期663-667,共5页Chinese Journal of Lasers

基　　金：重庆市院士基金(CSTC2008BC3002)资助课题

摘　　要：提出了一种新颖的面向激光投影的微光机电系统(MOEMS)光栅平动式光调制器(GMLM),利用衍射原理对光进行动态调制,具有较简单的工艺和投影光学系统。介绍了GMLM的光调制原理和以GMLM阵列为核心器件的投影光学系统的构成。建立了GMLM的等效光学模型,用标量衍射方法推导出了GMLM经过投影光学系统成像的夫琅禾费衍射图样复振幅分布。搭建了GMLM投影演示系统,进行了静态投影和动态投影实验。实验验证了上述公式的正确性,并且验证了GMLM光调制原理和投影成像原理。A novel micro-opto-electro-mechanical system（MOEMS）-based light modulator for laser project display is proposed,which is called grating moving light modulator（GMLM）.It can modulate light by diffraction,and has a simple fabrication process and projection optical system.The light modulation theory and the projection optical system of GMLM are introduced.The optical model of GMLM is found to deduce the Fraunhofer diffraction pattern through the projection optical system based on the scalar diffraction method.The static and dynamic projection experiments of GMLM array are completed by the projection demo system.The results demonstrate the operation and projection principle of GMLM.

关 键 词：微光机电系统 光栅平动式光调制器 标量衍射 激光投影显示 

分 类 号：TN27[电子电信—物理电子学]