柔性悬臂电磁驱动光开关的仿真与制作  

Simulation and fabrication of flexible cantilever electromagnet actuated optical switch

作　　者：徐大伟[1,2] 梁中翥[1] 梁静秋[1,2] 李伟[1,2] 李小奇[1,2] 孙智丹[1,2] 王维彪[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130033 [2]中国科学院研究生院,北京100049

出　　处：《物理学报》2010年第4期2479-2484,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:60578036);吉林省科技发展计划(批准号:20080343;20080122)资助的课题~~

摘　　要：设计并制作了一种用于波长信道选择系统的新型柔性悬臂梁电磁驱动光开关,该光开关采用微光机电系统技术制作,由带有平面螺旋形线圈的聚酰亚胺悬臂梁、圆柱形永磁体、基座以及双面反射棱镜组成.通过改变线圈中激励电流的方向来控制开关动作.运用有限元的方法,模拟分析了线圈与永磁体之间电磁力的分布以及悬臂梁回复力、电磁力与挠度的关系.对该光开关的驱动性能进行了测试,实验结果表明:加载较小的工作电流(0.15A),悬臂梁便可以产生较大的挠度(0.925mm),满足波长信道选择系统光路偏转的要求.A kind of flexible cantilever beam electromagnetic optical switch which is used in the wave length channel selection system was designed and fabricated.It was manufactured by micro-opto-electromechanical system technology and composed of a plane circular coil in flexible polyimide cantilever beam,a cylindrical permanent magnet,the substrate and a reflector prism with two reflecting surfaces.The switch＇s motion depends on the current direction in the coils.The simulation of force between the coils and the permanent magnet was proceeded by finite element method.In the same way,the relationship between cantilever＇s deflection and restoring force,and electromagnetic force were obtained.The switch＇s actuation performance was tested and the results indicate that deflection of the cantilever is 0.925 mm with 0.15 A current input,which satisfies the need of the wave length channel selection system of changing the propagation direction of the optical beam.

关 键 词：微光机电系统 光开关 柔性悬臂梁 电磁驱动 

分 类 号：TP211[自动化与计算机技术—检测技术与自动化装置]