自支撑透射光栅的设计、制作和测试  

Design,fabrication and test of x ray freestanding transmission gratings

作　　者：马杰[1] 谢常青[1] 叶甜春[1] 刘明[1] 

机构地区：[1]中国科学院微电子研究所,纳米加工与新器件集成研究室,北京100029

出　　处：《物理学报》2010年第4期2564-2570,共7页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2007CB935302,2006CB806204);国家自然科学基金(批准号:60825403)资助的课题~~

摘　　要：采用标量衍射理论和严格耦合波理论分别计算和讨论了金自支撑透射光栅的衍射效率随波长和光栅周期变化的情况并设计了光栅的结构参数.制作了周期为300nm、线宽/周期比为0.55、厚度为200nm、总面积为1mm×1mm、有效面积比为65%的金自支撑透射光栅.在国家同步辐射实验室检测了该光栅在5.5—38nm波长范围内的绝对衍射效率.检测结果表明所制作的光栅在8nm附近具有接近10%的最大衍射效率,并且该光栅对于波长15—35nm范围内的极紫外波段具有基本稳定的衍射效率.The diffraction efficiency of freestanding x ray transmission gratings is discussed in relation to the wavelength and grating period using both scalar diffraction theory and rigorous coupled wave analysis,and the grating design is accordingly optimized.A gold freestanding x ray transmission grating with period of 300 nm,line/period ratio of 0.55,thickness of 200 nm a size of 1 mm × 1 mm and fractional grating area of 65% is fabricated.The absolute diffraction efficiency of the fabricated grating was tested at the National Synchrotron Radiation Laboratory in the wavelength region of 5.5—38 nm.The test result shows that the grating has a maximum efficiency of nearly 10%.The grating also shows a stable diffraction efficiency in the wavelength region from 15 nm to 35 nm.

关 键 词：自支撑透射光栅 电子束光刻 电镀 

分 类 号：O436.1[机械工程—光学工程]