张力调节系统在金刚石单线切割设备上的应用  

The Application of Adjusting the Wire Tension to Diamond Single Wire Saw

作　　者：衣忠波[1] 王仲康[1] 杨生荣[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所材料设备事业部,北京东燕郊065201

出　　处：《电子工业专用设备》2010年第4期17-20,共4页Equipment for Electronic Products Manufacturing

摘　　要：金刚石单线切割设备主要是针对碳化硅等其他硬脆材料的切割,在单线切割过程中,切割线张力的突然变化会导致切割质量下降,甚至断线,必须增加张力调节系统,介绍了国内外单线切割设备的张力调节系统。Diamond Single Wire Saw is mainly used to cut SiC and other hard materials. The wafer cutting quality reduces and even the wire breaks when the wire tension changes suddenly ,during the process of cutting wafer, It is necessary to equip the wire tension adjusting system. It introduces the wire tension adjusting system in this equipment at home and abroad.

关 键 词：单线切割 线张力 张力调节 碳化硅 

分 类 号：TN305.1[电子电信—物理电子学]