便携式气体微流量计的设计  

Design of portable gas micro-flowmeter

作　　者：李得天[1] 冯焱[1] 赵澜[1] 张涤新[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空》2010年第2期60-63,共4页Vacuum

摘　　要：为了实现在工作现场对氦质谱检漏仪进行全量程漏率示值的校准,设计了一套便携式气体微流量计。该流量计由供气与抽气系统、定容室与压力测量系统、流量测量系统和烘烤系统等四部分组成,采用固定流导法及定容法两种模式提供和测量流量。在流量计的设计中,解决了小孔流导的设计和计算、定容室和抽气系统的小型化设计、应用选择性抽气技术延伸流量测量下限等关键技术,同时还采用了分体式结构设计,使流量计具有便于拆卸及携带,操作简单等优点。流量计预计达到的技术指标是,测量范围(:10-4～10-11)Pa.m3/s,标准不确定度小于10%。A portable gas micro-flowmter was designed to calibrate the leakage indication of helium mass spectrometer as leak detector over all its ranges. It is composed of a gas supplying/pumping system, constant volume chamberipressure measurement system, flow measurement system and baking system. Several key technological problems were solvedduring the design and calculation of the flowmeter, such as the flow conductance through orifice, miniaturization of constant volume chamber and pumping system and extending the lower limit of flow measurement by selective pumping process, especially the sectional construction available to disassembly, carrying and simple operation. The expected measurement range of the flnwmeter is （10^-4~10^-11 ） Pa·m3 /sec with an uncertainty less than 10%.

关 键 词：便携式 气体微流量计 固定流导法 定容法 漏率值校准 

分 类 号：TB77[一般工业技术—真空技术]