半导体制造工艺用化学药品的现状和展望  

The status and forecast of chemicals for semiconductor manufacturing process

作　　者：丁建良 俞亚君 

机构地区：[1]无锡化工研究设计院

出　　处：《化工新型材料》1998年第11期3-7,12,共6页New Chemical Materials

摘　　要：综述了半导体制造工艺用化学药品的应用、种类、作用、制法、纯度、评价技术和市场，还评论了半导体用药品现状和发展趋势。In this paper,the application,kind,action,manufacturing method,purity,evaluation technology,and market of chemicals for semiconductor manufacturing process are summarized.The present situation and development trend of chemicals for semiconductor are also reviewed.

关 键 词：湿化学品 金属杂质 半导体 化学药品 材料 

分 类 号：TN304[电子电信—物理电子学]