平面连续抛光技术在大尺寸异型石英轻质镜制造中的应用  

The Application of Continuous Polishing Technology to Manufacturing of a Large Size Special Shaped Lightweight Silicon Plane Mirror

作　　者：杨力[1] 周晨波[1] 陈强[1] 耿彦生[1] 王家金[1] 廖锦屏 

机构地区：[1]中国科学院光电技术研究所

出　　处：《光电工程》1998年第4期41-47,54,共8页Opto-Electronic Engineering

基　　金：国家863高技术研究计划

摘　　要：报导了采用１．６ｍ直径连续抛光机制造５８６ｍｍ×４４０ｍｍ、２０边形反射面板的大尺寸异型轻质平面反射镜的光学表面抛光技术。讨论了平面连续抛光理论和抛光工艺设备及特点。给出了最终制造结果。The continuous polishing technology for manufacturing of a large size special shaped lightweight silicon plane mirror (586mm×440mm) by using of a 1.6m diameter continuous polishing machine is reported n the paper.The plane continuous polishing theory,polishing technological equipment and their characteristics are discussed and the results are given.

关 键 词：轻质反射镜 抛光 工艺过程 石英轻质镜 

分 类 号：TS959.71[轻工技术与工程] TQ171.684[化学工程—玻璃工业]