六轴硅微静电加速度计的悬浮回路设计  

Design of electrostatic levitation loop for six-axis micromachined accelerometer

作　　者：段光武[1] 韩丰田[1] 付真斌[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《中国惯性技术学报》2010年第2期209-213,共5页Journal of Chinese Inertial Technology

基　　金：国家863项目(2008AA04Z312)

摘　　要：传统的静电加速度计在空间微弱加速度测量方面可以获得极高的分辨率。提出了一种采用静电悬浮、可实现六轴加速度测量的微静电加速度计。敏感组合件采用玻璃-硅-玻璃三层键合结构、体硅加工工艺;检测质量采用"回"字形结构,以提高加速度计的径向量程和刚度。利用有限元软件分析了大气环境下检验质量的气模阻尼特性,对六自由度静电悬浮回路进行了建模与分析,提出了实现六轴加速度检测的控制方案。给出了静电悬浮回路的仿真结果,评估了六轴加速度计的性能。The traditional electrostatically levitated accelerometer used in very weak space acceleration measurement could achieve extremely high resolution. So a six-axis accelerometer is presented based on electrostatic suspension. The sensor is realized in a glass-silicon-glass sandwich structure and fabricated by bulk silicon micromachining. The proof mass features a ＂photo frame＂ shape to improve the radial measurement range and suspension stiffness. A finite element analysis is performed to simulate the air film damping of the proof-mass in atmospheric environment. The electrostatically levitated system is modeled and analyzed, and a control scheme is presented to achieve the measurement of the six-axis acceleration. The simulation results of the suspension control loops are presented to evaluate the performance of the six-axis accelerometer.

关 键 词：微加速度计 六自由度 静电悬浮 气膜阻尼 

分 类 号：U666.1[交通运输工程—船舶及航道工程]