全息反射光栅的制作及其性能测试与分析  

THE FABRICATION OF A HOLOGRAPHIC REFLECTION GRATING AND ITS EXPERIMENTAL MEASUREMENT

作　　者：李秋祯[1] 张淑良[1] 

机构地区：[1]天津师范大学物理系

出　　处：《天津师大学报（自然科学版）》1998年第3期40-42,共3页

摘　　要：用光致抗蚀剂为记录介质制作１２００条／ｍｍ反射全息光栅并测试它的性能．＿其衍射效率最高可达６０％，＃ＦＫ分辨本领可达到同类型刻划光栅的水平．In this paper, we represent the fabrication of a holographic reflection grating which has a spatial frequency of 1 200 cycles/mm. with the recorder of photoresist. Its maximum diffraction efficiency is 60%. It has a resolution of the same degree with that obtained by the classical method of manufactnring gratings.

关 键 词：记录介质 衍射效率 光致抗蚀剂 全息反射光栅 

分 类 号：TB877.1[一般工业技术—摄影技术]