绒面掺铝氧化锌透明导电薄膜研究进展  

Development of Textured ZnO∶Al Transparent Conductive Oxide Thin Films

作　　者：何晶晶[1,2] 吴雪梅[1,2] 诸葛兰剑[3,2] 葛水兵[1,2] 

机构地区：[1]苏州大学物理系 [2]江苏省薄膜材料重点实验室,江苏苏州215006 [3]苏州大学分析测试中心

出　　处：《微纳电子技术》2010年第5期290-296,共7页Micronanoelectronic Technology

基　　金：国家自然科学基金(10575073);苏州市科技计划项目(SYJG0901)

摘　　要：绒面掺铝氧化锌(AZO)透明导电薄膜由于电阻率低、在可见光区域透过率高、绒面结构能有效散射入射光,提高太阳电池光电转换效率,被广泛应用于太阳电池前电极。概述了绒面AZO薄膜的制备方法,重点介绍了磁控溅射技术沉积AZO薄膜后再进行湿法刻蚀制绒面方法,制备的样品呈现"坑状"或"类月球地貌"的绒面,并讨论了工艺对薄膜结构、光电性能和刻蚀行为的影响,最后介绍了绒面AZO薄膜在硅薄膜太阳电池中的应用,进一步降低生产成本和实现大规模产业化生产是绒面AZO薄膜的发展趋势。Textured aluminum doped ZnO（AZO）transparent conductive films are widely used as front contacts in solar cells due to the low resistivity,high transmittance in the visible region,incident light scattering effectively for the textured structure and improving the photoelectric conversion efficiency.The preparation methods of the textured AZO are summarized.It is introduced in detail that the texture surface is made by the wet etching after AZO films are deposited by magnetron sputtering technology.The samples show the ＂crater＂ or ＂lunar landscape-like＂ appearance.The effects of the process on film structures,photoelectric properties and etching behaviors are discussed.Finally,the applications of textured AZO in silicon thin film solar cells are introduced,the development trends of textured AZO thin films are further reducing production costs and achieving large-scale industrial production.

关 键 词：绒面掺铝氧化锌 透明导电薄膜 磁控溅射 湿法刻蚀 太阳电池 

分 类 号：TN304.055[电子电信—物理电子学] TN304.21