应用于短脉冲激光加工的自动调焦系统  

Auto focusing system for short pulse laser machining

作　　者：邬泳[1] 傅星[1] 周志远[1] 刘春阳[1] 孙凤鸣[1] 胡小唐[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感器与微系统》2010年第5期105-108,共4页Transducer and Microsystem Technologies

基　　金：天津市重大科技攻关计划资助项目(043185811)

摘　　要：针对现有的纳秒脉冲激光微加工系统,设计了基于图像处理的自动调焦系统。从焦点检测的历史背景出发,结合光学的成像原理,提出了以图像梯度为对焦评价函数的自动调焦技术。把此自动调焦系统应用于原系统中,形成了以控制单元、激光器、机械结构和光路系统为主要组成部分的纳秒脉冲激光微加工系统。通过对加工实验效果和对焦评价函数曲线的对比分析,证实了此调焦系统适用于短脉冲激光加工,从而有效地提高了系统的加工精度和效率。Aimed at image processing technology, an auto focusing system is designed for nano-second pulse laser processing system. Through studying the historical background of the focus detection and principles of optical imaging, the auto focusing system adopts image gradient as the auto focusing evaluation function. Combined with the auto focusing system, a nano-second pulse laser machining system, including control system, software of computer,mechanical structure and optical system is designed. The relationship between experimental results and evaluation function of image gradient is analyzed. It confirms that the auto focusing system is suitable for laser processing system, and can improve the machining precision and efficiency.

关 键 词：自动调焦 激光加工 图像梯度 图像处理 

分 类 号：TP391.41[自动化与计算机技术—计算机应用技术]