基于柔性衬底的三维生物刺激微电极阵列研究  

Study on 3D bio-stimulating microelectrode array based on flexible substrate

作　　者：周然[1] 陈迪[1] 黄闯[1] 陈翔[1] 刘景全[1] 朱军[1] 

机构地区：[1]上海交通大学微米/纳米加工技术国家级重点实验室薄膜与微细技术教育部重点实验室,上海200240

出　　处：《传感器与微系统》2010年第5期134-136,共3页Transducer and Microsystem Technologies

摘　　要：设计了一种基于聚酰亚胺薄膜的三维生物刺激微电极阵列,用于植入式人造视网膜应用。采用非硅MEMS技术,在柔性衬底上制备出具有生物相容性和化学稳定性,电极高度为80μm的生物刺激电极阵列,通过PDMS牺牲层实现器件从基底的完整释放。实验中器件以聚酰亚胺和PDMS封装,电极柱和焊盘均镀金,从而提高电极的生物相容性。采用三电极法对微电极进行了电化学性能测试,在10-1～105Hz频率范围内,其阻抗为1.5～0.3 kΩ。制造出的器件尺寸小,质量轻,可靠性高,机械柔性好,符合生物电刺激要求。A novel 3D bio-stimulating microelectrode array was designed based on polyimide thin film for implantable artificial retina. Non-silicon MEMS technique was applied o fabricate the flexible microelectrode with the height of 80 μm,which is also bio-compatible and chemical stable. The microelectrode was then released from substrate by PDMS sacrificial layer process and packaged by polyimide and PDMS. Au was eletroplated on the surface of electrodes and pads to obtain bio-compatibility. The electrochemical properties of electrodes was detected by three-electrode method, and the impedance varied at the range of 1.5 ～0.3kΩ and at the frequency 10^-1～10^5Hz. With the advantages of small size,light weight, high reliability and flexibility, the device is suitable for bio-stimulation.

关 键 词：生物电极 视觉假体 MEMS技术 

分 类 号：TN405[电子电信—微电子学与固体电子学] TP212.3[自动化与计算机技术—检测技术与自动化装置]