BCl_3–C_3H_6–H_2体系的热力学相图研究(英文)  

RESEARCH ON STABILITY DIAGRAMS FOR BCl_3–C_3H_6–H_2 SYSTEM

作　　者：刘永胜[1] 刘善华[1] 左新章[1] 张立同[1] 成来飞[1] 曾庆丰[1] 

机构地区：[1]西北工业大学 超高温结构复合材料国防科技重点实验室,西安710072

出　　处：《硅酸盐学报》2010年第5期964-968,共5页Journal of The Chinese Ceramic Society

基　　金：长江学者和创新团队发展计划;凝固技术国家重点实验室(西北工业大学)自主研究课题(45–QP–2009)资助项目

摘　　要：利用 FactSage software 软件计算了 BCl3–C3H6–H2体系的热力学相图,分析了反应气体分压、系统总压以及沉积温度对热力学相图中固相产物种类、分布区域及面积的影响规律与作用机制。结果表明:(1)系统总压是影响相图中固相产物种类、分布区域及其面积的最主要因素。随系统总压升高,固相产物由简到繁,相图内 B 单质区域的面积增加,B+B4C 及 B4C+C 区域面积减小,B4C 区域面积变化不明显,各区域明显右移;相图内气态区域面积增加。(2)反应气体分压影响相图中固相产物的元素含量。随 C3H6分压增加,固相产物由 B 含量高的产物向 C 含量高的产物转变,即由B单质或 B+B4C 向 B4C+C 转变。(3)在 800～1 200 ℃,沉积温度对相图中产物种类及分布的作用不明显,沉积过程不受热力学控制。The stability thermodynamic diagrams for BCl3–C3H6–H2 system were calculated. The effects of reactant partial pressure, total pressure, and deposition temperature on product types and distribution regions of reacted solid products in the stable diagrams were discussed. The results are as follows： （1） the most important factor affecting deposit types and distribution regions of reacted solid products is total pressure. With the increase of total pressure, the stability diagram becomes complex; the region of elementary boron increases; the regions of B＋B4C and B4C＋C decrease; the region of B4C shows no significant change; and the distribution re-gions of all deposits shift to the right side of the diagrams. （2） The element content in the deposits from the solid product reaction would be influenced by the reactant partial pressure. The compositions of deposits change from high boron contained to high carbon contained with the increase of C3H6 pressure, namely, from B or B＋B4C region to B4C＋C region. （3） The deposition temperature has no obvious influence within the temperature range of 800–1 200 ℃, which indicates that the deposition process is not controlled by thermodynamic factors.

关 键 词：三氯化硼–丙烯–氢体系 热力学相图 化学气相沉积 气体分压 系统总压 沉积温度 

分 类 号：TB323[一般工业技术—材料科学与工程]