Pt/TiO_2二极管湿敏传感器  

Humidity Sensor of Pt/TiO_2 Diode

作　　者：孙德明[1] 肖梦秋[1] 汪荣昌[1] 戎瑞芬[1] 

机构地区：[1]复旦大学材料科学系,上海200433

出　　处：《Journal of Semiconductors》1999年第3期200-205,共6页半导体学报（英文版）

摘　　要：Pt常被用来在金属氧化物半导体上做肖特基接触 .在常温下 ,Pt/ Ti O2 界面处的电子电导对 Pt/ Ti O2 肖特基势垒高度的变化非常敏感 .本文描述了利用该性质制造的湿敏传感器的性能 ,并讨论了因水在 Pt/ Ti O2 界面处的化学吸附 ,引起表面态费米能级改变 ,影响 Pt/Ti O2 肖特基势垒的高度 ,从而导致了 I- V曲线的变化的物理过程 。Platinum is often used as the contact material of metal\|oxide based semiconductor gas sensors. At room temperature, the electronic conductivity across the Pt/TiO 2 interface leads to extremely sensitive Schottky\|barrier humidity sensors. The mechanism is that the change of the height of Schottky\|barrier at the interface of Pt and TiO 2 altered by the chemisorption of water leads to the drift of I\|V characteristic curve. The properties of such a Pt/TiO 2 humidity sensor are described, and the related fabrication problems are also discussed.

关 键 词：半导体湿敏器件 二极管 湿敏传感器 

分 类 号：TN379[电子电信—物理电子学]