微机电系统关键技术及其研究进展  

Key Technologies of Micro-electromechanical System and Its Recent Progress

作　　者：张冬至[1] 胡国清[1] 

机构地区：[1]华南理工大学机械与汽车工程学院,广东广州510640

出　　处：《压电与声光》2010年第3期513-520,共8页Piezoelectrics & Acoustooptics

基　　金：华南理工大学优秀博士学位论文创新基金资助项目(200903023);国家留学基金委员会资助项目(2009615035)

摘　　要：微机电系统(MEMS)是在微电子技术的基础上兴起的一个多学科交叉的前沿领域,集约了当今科学技术发展的许多尖端成果,在汽车电子、航空航天、信息通讯、生物医学、自动控制、国防军工等领域应用前景广阔。该文介绍了微机电系统发展的背景与基础理论研究,综述了微机电系统所涉及的器件设计、制作材料、3大加工工艺(硅微机械加工、精密微机械加工与光刻、电铸和注塑(LIGA)技术)、微封装与测试等关键技术,总结了微机电系统在微纳传感器、微执行器、微机器人、微飞行器、微动力能源系统、微型生物芯片等方面的典型应用,最后指明了MEMS技术的发展趋势,有望在近几十年将大量先进的MEMS器件从实验室推向实用化和产业化。Micro-electromechanical system （MEMS）, developed on the basis of microelectronics, is a scientific research frontier of multi-disciplines and assimilates the most advanced achievements in current research and development. MEMS extends into various fields with wide application prospects, such as automotive electronics, aeronautics and astronautics, information communication, biomedicine, auto-control and defense industry, et al. This paper introduces the background of MEMS development and its basic theory research. The key technologies of MEMS such as device design, fabricating material, three advanced machining processes （silicon micromachining, precision micromachining and LIGA technique）, micro-packaging and testing are reviewed. Further more, the typi- cal applications and latest development in fields including micro/nano-sensor, micro-actuator, micro-robot, micro air vehicle, micro-power energy system, micro biological chip are discussed, and lastly the future development of MEMS is put forward. A good many of advanced MEMS devices are hopeful put into practicality and industrialization from laboratory in recent decades.

关 键 词：微机电系统 微机械加工 微传感器 纳米制造 聚合物微机电系统(MEMS) 

分 类 号：TN454[电子电信—微电子学与固体电子学]