精密电容式动态在线薄膜测厚仪的研制  

Development of the Precision Dynamic On line Capacitance Measuring Instrument of Thin Film Thickness

作　　者：李东光[1] 李红民[1] 郑义忠[1] 

机构地区：[1]天津大学精密仪器及光电子工程学院

出　　处：《仪表技术与传感器》1999年第1期13-16,共4页Instrument Technique and Sensor

摘　　要：介绍一种以８０３１单片机为核心，采用电容传感器对薄膜厚度进行动态在线测量的高精度高分辨率仪器。仪器采用反馈运算方法，使用驱动电缆技术，克服了电容传感器输出的非线性，并提高了仪器整机的抗干扰能力。测量结果在单片机系统的控制下，实时进行数显，同时将被测过程量的变化情况通过ＴＶ板变成视频信号送入视频显示器，直观反映出测量结果的变化趋势。The high resolution and high precision instrument based on MSC 51 and capacitance transducer to measure the thin film thickness on line is introduced. In order to overcome the non linearity of capacitance transducer and improve the anti interference capacity of the instrument, the techniques of feedback amplifier and drive cable are employed. Under the control of the single chip microprocessor, the measuring results are digitally displayed and their change tendency is obtained by transform digital signal to video signal using the TV board.

关 键 词：电容传感器 动态测量 薄膜测厚仪 厚度测量 

分 类 号：TH821.1[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]