非平衡磁控溅射氟化类金刚石(DLC)薄膜的结构和性能  

Structure and Properties of Diamond Like Carbon(DLC) and Fluorinated DLC Deposited by Unbalanced Magnetron Sputtering

作　　者：赵建生[1] Choy,KL 

机构地区：[1]华中理工大学

出　　处：《中国机械工程》1999年第1期93-96,共4页China Mechanical Engineering

摘　　要：使用非平衡磁控溅射方法，以Ｃ２Ｈ２为反应气，Ｃ２Ｆ２为氟化气沉积了含氟和不含氟的类金刚石（ＤＬＣ）薄膜。用Ｘ射线光电子谱仪（ＸＰＳ）及Ｒａｍａｎ光谱仪分析薄膜的成分及结构。试验了薄膜的力学性能并讨论了组织结构对性能的影响。结果表明，含氟ＤＬＣ仍具有典型的ＤＬＣ的Ｒａｍａｎ光谱特性。氟降低薄膜中的Ｉ（Ｄ）／Ｉ（Ｇ）比率，使薄膜中的ＳＰ３键相对含量下降。随着氟含量的增加，ＤＬＣ的硬度下降，摩擦系数减小。适当含量Ｆ元素可以提高薄膜划痕试验的临界负荷，增加薄膜与基体的结合强度。DLC and fluorinated DLC were deposited by enclosed unbalanced magnetron sputtering using C 2H 2 as a reactive gas and C 2F 2 as a fluorine source gas.X ray photoelectron spectroscopy(XPS) and Raman spectroscopy were employed to determine the composition and structure of the films.Mechaincal properties of the films were tested.The relation between the structure and properties were discussed.The results show that the fluorinated DLC has a typical Raman spectra like that of DLC.Fluorine decrease the intense ratio of D line and G line,the relative content of SP 3 bond in the film of fluorinated DLC was decreased comparing with that of non fluorinated DLC.The hardness and friction coefficient of the fluorinated DLC decreased according to the increasing of fluorine content in the DLC films.Proper fluorine content in the DLC could increase the critical scratch load in the scratch test,so that the adhesion ability between the films and substrate was increased.

关 键 词：磁控溅射 类金刚石薄膜 DLC 力学性能 

分 类 号：O484.5[理学—固体物理]