MEMS技术在流动分离主动控制中的应用  

Two MEMS Actuators for Application-Oriented Active Control of Flow Separation

作　　者：邓进军[1] 苑伟政[1] 罗剑[1] 马炳和[1] 姜澄宇[1] 

机构地区：[1]西北工业大学微/纳米系统实验室,陕西西安710072

出　　处：《西北工业大学学报》2010年第3期381-387,共7页Journal of Northwestern Polytechnical University

基　　金：国家自然科学基金(90305017);机械系统与振动国家重点实验室开放课题基金资助

摘　　要：文章面向飞行器翼型绕流的控制,设计开发了气泡型和合成射流等2类采用MEMS技术制造的微型致动器,并对其性能进行了测试。结合三角翼及二元超临界翼型,通过风洞实验考察了MEMS微型致动器在翼型流动分离主动控制的应用效果。结果表明,微致动器能够有效控制边界层流动状态,改变翼型绕流的宏观流场,实现增升减阻以及产生辅助力矩等控制目标。With the help of Figs. 3 and 4, subsection 2.1 of the full paper uses MEMS （ microelectromechanical system） technology to explain the structural design of a micro balloon actuator; with the help of Figs. 6 and 7, subsection 2.2 explains the structural design and fabrication process of a piezoelectric micro synthetic jet actuator. Subsection 3.1 gives the test results of the performance of the actuator in subsection 2.1 ; subsection 3.2 gives those of the actuator in subsection 2.2. Section 4 presents in Figs. 12 and 13 the wind tunnel test results of the actuator in subsection 2.1 ; these results and their analysis show preliminarily that the micro balloon actuator can effectively control boundary layer separation, change the flow field of airfoil and achieve the goals of lift enhancement, drag reduction and auxiliary torque generation, etc.

关 键 词：致动器 微电子机械器件 流动控制 微机电系统 流动分离 主动控制 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]