微机械加速度计校正电路的工程设计  

Engineering Design of Compensator Circuit in MEMS Accelerometer

作　　者：胡淏[1] 董景新[1] 万蔡辛[1] 

机构地区：[1]清华大学,北京100084

出　　处：《现代导航》2010年第1期13-16,共4页Modern Navigation

摘　　要：梳齿式微机械加速度计是一种敏感电容极板间距变化的电容式传感器，通过静电力反馈构成力平衡式的闭环系统。为了满足稳定性、快速性等要求，需要采用校正电路。微机械表头性能具有较大的离散性是工程中的常见问题。本文根据控制理论结合工程试验，针对表头转角频率和低频增益等参数对校正电路设计方案进行分类。使系统在满足带宽的前提下，在全量程范围内具有充足的稳定裕量。并且，为了适应工程应用，电路形式采用两个运放，保证了电路形式的简单，为电路冗余设计提供了方便。通过较多数量的试验验证，此种方法对闭环系统的稳定性、带宽有很好的控制作用。The MEMS accelerometer is a closed-loop system. In order to meet the stability, speediness, etc., compensator circuit is required. In engineering projects, difference in MEMS sensor is obvious. Based on control theory and engineering experiments, this paper analyses the sensors which are divided with different amplitude-frequency characteristics. It will provide good stability margin in full scale range while meeting the bandwidth requirements. More special, all the compensator circuits mentioned in this paper use only two operational amplifiers, in order to reduce the circuit complication. According to many experiment, these methods have good results in improving stability and controlling the bandwidth of MEMS accelerometers.

关 键 词：微机械加速度计 校正电路 PI校正 冗余设计 

分 类 号：TH162[机械工程—机械制造及自动化]