热驱动微型电场传感器干燥技术  

The Drying Techniques for Thermally Driven MEFS

作　　者：郭鑫[1,2] 杨鹏飞[1,2] 张海岩[1,2] 彭春荣[1] 夏善红[1] 

机构地区：[1]中国科学院电子学研究所传感技术国家重点实验室,北京100190 [2]中国科学院研究生院,北京100190

出　　处：《传感技术学报》2010年第6期786-790,共5页Chinese Journal of Sensors and Actuators

基　　金：863项目资助(2008AA042207)

摘　　要：介绍了热驱动微型电场传感器的工艺流程,主要介绍了微型电场传感器的释放干燥工艺。热驱动微型电场传感器工艺存在的最大问题是牺牲层释放以后容易产生粘连,为了避免粘连现象的产生,采用了不同的干燥方法,如蒸发干燥法、CO2临界点干燥法、自组装膜方法,并对这些方法的优缺点进行了比较。对不同干燥方法制备的热驱动微型电场传感器的性能进行了测试,得到自组装膜法制备的热驱动微型电场传感器具有更好的灵敏度。The fabrication of the thermally driven miniature electric field sensor （MEFS） is introduced in this paper,especially the release and drying process of the MEFS.The biggest problem of the fabrication of MEFS is the sticking after releasing the sacrificial layer.Some methods such as evaporation drying,CO2 critical point drying and the method of self-assembled monolayer were used in the experiment.Advantages and disadvantages of these methods were compared.Some tests have been done to the MEFSs prepared by different drying methods.The experimental results show that the MEFSs prepared by the method of self-assembled monolayer have better sensitivity.

关 键 词：电场传感器 粘连现象 临界点干燥 自组装膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]