高灵敏度激光光致交联剂的研究  

Investigation on Laser Photo- crosslinking Agent of High Sensitivity

作　　者：金桂林[1] 张兆奎[1] 金晓英[1] 蔡暄 

机构地区：[1]华东理工大学物理系,上海200237

出　　处：《应用激光》1999年第2期57-60,共4页Applied Laser

摘　　要：合成了具有不同分子骨架结构的二迭氮基芳香族化合物．它们的紫外吸收带发生红移，以它们为交联剂，与聚甲基丙烯酸甲酯（PMMA）以及光敏剂苯氧基二本甲酮（PB）构成光致抗蚀剂体系，在空气环境中，在氮分子激光辐照下进行交联反应。其中典型的PMMA－DDB－PB系统的光致交联反应速率为4．5×104mol·1-1·s-1；而PMMA－DDA系统的反应速率达23．0×104mol·1-1·s-1，曝光5．6μs时转化率达90％，表明DDA对于氮分子激光高度灵敏，可以同时起到光敏剂与交联剂的双重作用。The diazido aromatic compounds of different molecular bone -- frame structures were synthesized. Their UV absorption bands had red shifts. The photoresist systems were made of the said azides as photo -- crosslinking agents, along with polymethyl methacrylate (PMMA)and 4 -- phenoxy benzophenone (PB) as photo -- sensitizer. Irradiated by nitrogen laser beam, the said systems were crosslinked in the condition of air. The typic reaction rate of system PMMA- DDB -- PB was 4. 5 ×104 mol· 1-1· s-1. The reaction rate of system PMMA -- DDA was 23. 0 ×104mol. 1-1· s-1, and its conversion ratio was 90% when irradiated for 5. 6 μs. This indicated that DDA was highly sensitive to nitrogen laser beam, and was able to be both the photo -- sensitizer and crosslinking agent.

关 键 词：光致交联剂 光致抗蚀剂 迭氮化合物 激光蚀剂 

分 类 号：TQ314.24[化学工程—高聚物工业] TN24[电子电信—物理电子学]