硅基光波导材料的研究  

Research on silicon-based optical waveguide materials

作　　者：陈媛媛[1] 

机构地区：[1]北京工商大学计算机与信息工程学院,北京100048

出　　处：《激光与红外》2010年第8期811-816,共6页Laser & Infrared

摘　　要：光波导是集成光路及其元器件中最基本的构成单元。本文介绍了各种不同类型的光波导材料的特性。硅材料作为目前研究得最透彻的半导体材料,它在光电子领域的应用也是令人关注的。硅基光波导材料种类繁多,主要包括聚合物、外延硅/重掺杂硅、SiO2,SOI和SiGe/Si等。硅基光波导材料是实现硅基光波导器件的基础,本文阐明了它们各自的特点和应用前景。其中聚合物、SiO2和SOI波导是目前研究的热点。The optical waveguide is the basic unit to make up optical circuit and devices.The performances of different optical waveguide materials are reviewed.Silicon is the most common and familiar semiconductor material at the present research which has attracted many attentions in optoelectronic domain.There are many kinds of silicon-based optical waveguide materials,including polymer,epitaxial/adulterate silicon,SiO2,SOI and SiGe/Si etc.They can realize silicon-based optical waveguide devices.In this paper,properties and prospects of applications of different optical waveguide materials are reviewed.Among the materials polymer SiO2 and SOI are research hotspot at present.

关 键 词：光波导材料 硅基 聚合物 SIO2 SOI 

分 类 号：TN252[电子电信—物理电子学]