非制冷微测辐射热计支撑层厚度比研究  

THICKNESS RATIO OF SUPPORT MEMBRANES FOR UNCOOLED INFRARED MICROBOLOMETER

作　　者：许路加[1] 胡明[1] 杨海波[1] 杨孟琳[1] 张洁[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《红外与毫米波学报》2010年第4期251-254,共4页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(60371030;60771019);天津大学先进陶瓷与加工技术教育部重点实验室开放基金(ACMT-2008-05)

摘　　要：根据实验室设计的单层微测辐射热计所采用的Si3N4和SiO2双层膜复合支撑结构工艺,分别利用力学的等效截面方法和复合材料热导公式,从理论上推导了微桥桥腿正应力和热导的解析表达式.分析在其它因素不变的情况下,仅调整Si3N4和SiO2两者厚度比值(m)对微测辐射热计力学和热学性质的影响,并用ANSYS有限元仿真的方法验证了理论推导.Based on the technology of monolayer microbolometer, which used Si3N4 and SiO2 double-layer membrane supporting materials, the analytic expressions of the normal stress and the thermal conductivity of the microbridge leg were derived by using the mechanical equivalent cross-section methods and the composite thermal conductivity formula. The influence of the thickness ratio m of Si3 N4 to SiO2 on the mechanical and thermal characteristics of mierobridge was analyzed when other factors were not changed. At last, the theoretical derivation was verified by the method of ANSYS finite element simulation.

关 键 词：非制冷红外成像 支撑层 微测辐射热计 微桥结构 厚度比 

分 类 号：TN215[电子电信—物理电子学]